Japan original imported OPTORUN OTFC1300,

　　It is suitable for producing AR coatings and optical filters.

　　Chamber size:φ1300mm

　　60-point optical thickness monitor.

　　RF ion source achieving uniformed, larger ion beam distribution

　　over a larger area at high ion current density.

　　Over 100 layers can be deposited by 2 EB guns and multi-point

　　crucible hearth or annular hearth.

　　Auto-deposition control system for fully automated process.

　　Center-driving or planetary substrate dome is selectable.

　　Diffusion pumps plus Cryo- pumps.