Japan made OPTORUN OTFC1300

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Japan made OPTORUN OTFC1300

      Japan original imported OPTORUN OTFC1300,

  It is suitable for producing AR coatings and optical filters.

  Chamber size:φ1300mm

  60-point optical thickness monitor.

  RF ion source achieving uniformed, larger ion beam distribution

  over a larger area at high ion current density.

  Over 100 layers can be deposited by 2 EB guns and multi-point

  crucible hearth or annular hearth.

  Auto-deposition control system for fully automated process.

  Center-driving or planetary substrate dome is selectable.

  Diffusion pumps plus Cryo- pumps.

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