Japan original imported OPTORUN OTFC1300,
It is suitable for producing AR coatings and optical filters.
Chamber size:φ1300mm
60-point optical thickness monitor.
RF ion source achieving uniformed, larger ion beam distribution
over a larger area at high ion current density.
Over 100 layers can be deposited by 2 EB guns and multi-point
crucible hearth or annular hearth.
Auto-deposition control system for fully automated process.
Center-driving or planetary substrate dome is selectable.
Diffusion pumps plus Cryo- pumps.